An Overview of Atomic Layer Deposition Technique: Synthesis of ZnO, TiO2 and Al2O3 Films
Technological products in the fields of optoelectronic, energy conversion, nano-medical applications and catalysis etc. need to produce nano-sized materials production due to the technologies miniaturization together with developing technologies. For this purpose, scientific studies are focus on the...
Main Authors: | Meryem POLAT GÖNÜLLÜ, Hakan ATEŞ |
---|---|
Format: | Article |
Language: | English |
Published: |
Gazi University
2019-09-01
|
Series: | Gazi Üniversitesi Fen Bilimleri Dergisi |
Subjects: | |
Online Access: | https://dergipark.org.tr/en/download/article-file/801860 |
Similar Items
-
Investigation of Energy Band at Atomic-Layer-Deposited ZnO/β-Ga2O3 ( 2¯01 $$ \overline{2}01 $$) Heterojunctions
by: Shun-Ming Sun, et al.
Published: (2018-12-01) -
The Antibacterial Polyamide 6-ZnO Hierarchical Nanofibers Fabricated by Atomic Layer Deposition and Hydrothermal Growth
by: Zhengduo Wang, et al.
Published: (2017-06-01) -
The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO2 Films Deposited by Atomic Layer Deposition
by: Rachel L. Wilson, et al.
Published: (2018-03-01) -
On the evaluation of ALD TiO2, ZrO2 and HfO2 coatings on corrosion and cytotoxicity performances
by: Mirco Peron, et al.
Published: (2021-09-01) -
Two-step deposition of Al-doped ZnO on p-GaN to form ohmic contacts
by: Xi Su, et al.
Published: (2017-07-01)