Improvement of drawing stability and throughput in scanning probe lithography based on anti-wear probes
In this paper, we demonstrate the improvement in drawing stability and throughput of scanning probe lithography (SPL) based on anti-wear probes. In order to improve the stability of SPL, we conceive of a novel anti-wear probe to improve the wear resistance of the probe. The tip of the proposed anti-...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2015-04-01
|
| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/81/825/81_14-00504/_pdf/-char/en |