Multilevel Bipolar Electroforming-Free Resistive Switching Memory Based on Silicon Oxynitride
Resistive random-access memory (RRAM) devices are fabricated by utilizing silicon oxynitride (SiO<sub>x</sub>N<sub>y</sub>) thin film as a resistive switching layer. A SiO<sub>x</sub>N<sub>y</sub> layer is deposited on a p+-Si substrate and capped with...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-05-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/10/10/3506 |