Enhancement of silicon sub-bandgap photodetection by helium-ion implantation
Abstract Silicon sub-bandgap photodetectors can detect light at the infrared telecommunication wavelengths but with relatively weak photo-response. In this work, we demonstrate the enhancement of sub-bandgap photodetection in silicon by helium-ion implantation, without affecting the transparency tha...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer & Higher Education Press
2023-12-01
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| Series: | Frontiers of Optoelectronics |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/s12200-023-00096-x |