Membraneless Piezoelectric MEMS speakers based on AlN Thin Film
This paper reports piezoelectric aluminum nitride (AlN) based microelectromechanical systems (MEMS) speakers. We introduce a novel geometry of microspeakers based on AlN to meet the requirements of modern applications such as phones, tablets, laptops, and in ear applications. We introduce the princi...
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| Format: | Article |
| Language: | Arabic |
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Assiut University, Faculty of Engineering
2022-01-01
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| Series: | JES: Journal of Engineering Sciences |
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| Online Access: | https://jesaun.journals.ekb.eg/article_215432_edc10250f0d28a518036217505f6bb63.pdf |