Superior dielectric properties of epoxy-based photoresist thin film nanocomposites with carbon-coated Cu@C nanoparticles
The microelectronics community has shown great interest for high-k percolative nanodielectric materials for their applications as integrated capacitors. This work highlights the manufacturing process of high-quality Metal Polymer Nanocomposites (MPCs) thin dielectric films with Cu@C nanoparticles in...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2022-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ac9574 |