A Compact Electromagnetic Dual Actuation Positioning System with a 10 mm Range and Nanometer Resolution

A Compact Electromagnetic Dual Actuation Positioning System with a 10 mm Range and Nanometer Resolution

In this manuscript, a compact electromagnetic dual actuation positioning system (CEDAPS) based on the Lorentz force principle that features a 10 mm range and nanometer-scale resolution with flexure guides is presented. Firstly, the stiffness of the flexure mechanism is modelled. Secondly, based on i...

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Bibliographic Details
Main Authors: Bimal Jeet Goteea, Qianjun Zhang, Wei Dong
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Actuators
Subjects:
electromagnetic actuator
flexure guide
electromagnetic force simulation
macro-micro actuation
nanopositioning stage
Online Access:https://www.mdpi.com/2076-0825/12/3/132

Internet

https://www.mdpi.com/2076-0825/12/3/132

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