Thin Tin and Tio2 Film Deposition in Glass Samples by Cathodic Cage

Thin Tin and Tio2 Film Deposition in Glass Samples by Cathodic Cage

Thin nitride and titanium dioxide films were produced using an innovative technique called cathodic cage depositon. Uniformity, three-dimensionality and high rate deposition are some of the advantages of this technique. In this study we discuss the influences of temperature, treatment time and gaseo...

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Bibliographic Details
Main Authors: Rômulo Ribeiro Magalhães de Sousa, Francisco Odolberto de Araújo, Thercio Henrique de Carvalho Costa, Igor Oliveira Nascimento, Francisco Eroni Paes Santos, Clodomiro Alves Júnior, Michelle Cequeira Feitor
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2015-04-01
Series:Materials Research
Subjects:
titanium nitride
cathodic cage
titanium dioxide
thin films and hollow cathode
Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392015000200347&tlng=en

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http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392015000200347&tlng=en

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