Suppression of Isolation Table's Fluctuation Due to Switching of Feedforward Controller
To avoid a longer settling time of an isolation table, switching of the feedforward controller which is used for the control of supplied air's disturbances, is needed after starting and prior to stopping the table. However, this switching also causes the fluctuation of the table. In order t...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2011-11-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/5/4/5_4_295/_pdf/-char/en |