Design, Assembly, and Simulation of Flexure-Based Modular Micro-Positioning Stages
With flexure-based micro-positioning stages (MPSs) being in high demand for high-precision applications, the performance and cost of flexure-based MPSs are two issues that urgently need to be addressed. In addition, the current MPSs are being developed toward complex spatial configurations, which fu...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-05-01
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| Series: | Machines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-1702/10/6/421 |