Technological Assessment of MEMS Alkali Vapor Cells for Atomic References

This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail. Special attention is paid to alkali atom introduction methods...

Full description

Bibliographic Details
Main Author: Pawel Knapkiewicz
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/10/1/25