Technological Assessment of MEMS Alkali Vapor Cells for Atomic References
This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for miniature and chip-scale atomic clocks. Technology on microelectromechanical systems (MEMS) cells from the literature is described in detail. Special attention is paid to alkali atom introduction methods...
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Format: | Article |
Language: | English |
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MDPI AG
2018-12-01
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Series: | Micromachines |
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Online Access: | http://www.mdpi.com/2072-666X/10/1/25 |