Silicon anisotropy in a bi-dimensional optomechanical cavity
In this work, we study the effects of mechanical anisotropy in a 2D optomechanical crystal geometry. We fabricate and measure devices with different orientations, showing the dependence of the mechanical spectrum and the optomechanical coupling on the relative angle of the device to the crystallogra...
Principais autores: | , , , , , , , |
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Formato: | Artigo |
Idioma: | English |
Publicado em: |
AIP Publishing LLC
2023-05-01
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coleção: | APL Photonics |
Acesso em linha: | http://dx.doi.org/10.1063/5.0135407 |