Ultra-Low Capacitance Spot PIN Photodiodes
Spot PIN photodiodes were integrated without any process modifications in a high-voltage 0.18 μm CMOS technology. These photodiodes are a combination of vertical and lateral PIN photodiodes using the P+ bulk wafer and a P-type ring at the surface as anodes. Devices with N&#...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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IEEE
2023-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10058044/ |
| _version_ | 1827989578388078592 |
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| author | Bernhard Goll Kerstin Schneider-Hornstein Horst Zimmermann |
| author_facet | Bernhard Goll Kerstin Schneider-Hornstein Horst Zimmermann |
| author_sort | Bernhard Goll |
| collection | DOAJ |
| description | Spot PIN photodiodes were integrated without any process modifications in a high-voltage 0.18 μm CMOS technology. These photodiodes are a combination of vertical and lateral PIN photodiodes using the P+ bulk wafer and a P-type ring at the surface as anodes. Devices with N+ cathode and N+/N-well cathode are compared. A small N+/N-well cathode spot reduces the capacitance to 1.47 fF and the N+ cathode spot leads to a capacitance of 1.07 fF. The light sensitive area of these photodiodes is 707 μm<sup>2</sup>. Simulated electric field distributions show the full depletion of the spot PIN photodiodes. Responsivities from 0.12 A/W to 0.16 A/W and from 0.50 A/W to 0.52 A/W for 405 nm and 675 nm, respectively, are achieved. The measured bandwidths for 675 nm light are from 520 MHz to 690 MHz at reverse biases from 15 V to 30 V. |
| first_indexed | 2024-04-10T00:21:30Z |
| format | Article |
| id | doaj.art-d9bddab9919a4260970b9aae1fd0d334 |
| institution | Directory Open Access Journal |
| issn | 1943-0655 |
| language | English |
| last_indexed | 2024-04-10T00:21:30Z |
| publishDate | 2023-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj.art-d9bddab9919a4260970b9aae1fd0d3342023-03-15T23:00:09ZengIEEEIEEE Photonics Journal1943-06552023-01-011521610.1109/JPHOT.2023.325189310058044Ultra-Low Capacitance Spot PIN PhotodiodesBernhard Goll0https://orcid.org/0000-0003-2174-8491Kerstin Schneider-Hornstein1https://orcid.org/0000-0002-7669-2192Horst Zimmermann2https://orcid.org/0000-0003-3221-0769Institute of Electrodynamics, Microwave and Circuit Engineering, Technische Universität Wien, Vienna, AustriaInstitute of Electrodynamics, Microwave and Circuit Engineering, Technische Universität Wien, Vienna, AustriaInstitute of Electrodynamics, Microwave and Circuit Engineering, Technische Universität Wien, Vienna, AustriaSpot PIN photodiodes were integrated without any process modifications in a high-voltage 0.18 μm CMOS technology. These photodiodes are a combination of vertical and lateral PIN photodiodes using the P+ bulk wafer and a P-type ring at the surface as anodes. Devices with N+ cathode and N+/N-well cathode are compared. A small N+/N-well cathode spot reduces the capacitance to 1.47 fF and the N+ cathode spot leads to a capacitance of 1.07 fF. The light sensitive area of these photodiodes is 707 μm<sup>2</sup>. Simulated electric field distributions show the full depletion of the spot PIN photodiodes. Responsivities from 0.12 A/W to 0.16 A/W and from 0.50 A/W to 0.52 A/W for 405 nm and 675 nm, respectively, are achieved. The measured bandwidths for 675 nm light are from 520 MHz to 690 MHz at reverse biases from 15 V to 30 V.https://ieeexplore.ieee.org/document/10058044/CMOSspot photodiodesfinger photodiodeslow capacitancePIN photodiodes |
| spellingShingle | Bernhard Goll Kerstin Schneider-Hornstein Horst Zimmermann Ultra-Low Capacitance Spot PIN Photodiodes IEEE Photonics Journal CMOS spot photodiodes finger photodiodes low capacitance PIN photodiodes |
| title | Ultra-Low Capacitance Spot PIN Photodiodes |
| title_full | Ultra-Low Capacitance Spot PIN Photodiodes |
| title_fullStr | Ultra-Low Capacitance Spot PIN Photodiodes |
| title_full_unstemmed | Ultra-Low Capacitance Spot PIN Photodiodes |
| title_short | Ultra-Low Capacitance Spot PIN Photodiodes |
| title_sort | ultra low capacitance spot pin photodiodes |
| topic | CMOS spot photodiodes finger photodiodes low capacitance PIN photodiodes |
| url | https://ieeexplore.ieee.org/document/10058044/ |
| work_keys_str_mv | AT bernhardgoll ultralowcapacitancespotpinphotodiodes AT kerstinschneiderhornstein ultralowcapacitancespotpinphotodiodes AT horstzimmermann ultralowcapacitancespotpinphotodiodes |