Investigation of Laser Ablation Quality Based on Data Science and Machine Learning XGBoost Classifier

Investigation of Laser Ablation Quality Based on Data Science and Machine Learning XGBoost Classifier

This work proposes a matching data science approach for the laser ablation quality, <i>r<sub>eb</sub></i>, the study of Si<sub>3</sub>N<sub>4</sub> film based on supervised machine learning classifiers in the CMOS-MEMS process. The study demonstrates t...

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Bibliographic Details
Main Authors: Chien-Chung Tsai, Tung-Hon Yiu
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Applied Sciences
Subjects:
machine learning
XGBoost classifier
laser ablation
CMOS-MEMS
k-means
Online Access:https://www.mdpi.com/2076-3417/14/1/326

Internet

https://www.mdpi.com/2076-3417/14/1/326

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