Two-dimensional particle-in-cell simulation of electron heating effect in multiple hollow cathode trenches with curved boundary
A particle-in-cell simulation is suitable for simulating capacitively coupled plasma devices because it calculates the trajectory of particles with arbitrary energy distributions and has the advantage of analyzing sheath dynamics precisely. Implementing the ghost grid method in the Poisson solver ma...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2023-03-01
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| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2023.1137994/full |