Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges

Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges

Using bulk micromachining, meander-shaped resistor elements consisting of 20 nm Cr and 200 nm Au were fabricated on 1 µm thick silicon nitride membranes, bridges, and cantilevers. The resistance change as a function of pressure depends strongly on the thermal resistance of the two metal lines connec...

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Bibliographic Details
Main Authors: Kasun Gardiye Punchihewa, Evan Zaker, Rade Kuljic, Koushik Banerjee, Tatjana Dankovic, Alan Feinerman, Heinz Busta
Format: Article
Language:English
Published: MDPI AG 2012-06-01
Series:Sensors
Subjects:
miniaturized vacuum and pressure gauges
MEMS-based Pirani gauges
silicon bulk micromachining
thermal conductivity of metals
insulators
air
low power sensing
Online Access:http://www.mdpi.com/1424-8220/12/7/8770

Internet

http://www.mdpi.com/1424-8220/12/7/8770

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