EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging

EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging

For more than 15 years, Imagine Optic have developed Extreme Ultra Violet (EUV) and X-ray Hartmann wavefront sensors for metrology and imaging applications. These sensors are compatible with a wide range of X-ray sources: from synchrotrons, Free Electron Lasers, laser-driven betatron and plasma-base...

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Bibliographic Details
Main Authors: Ombeline de La Rochefoucauld, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Lei Huang, Xavier Levecq, Martin Piponnier, Philippe Zeitoun
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Sensors
Subjects:
EUV wavefront sensor
X-ray wavefront sensor
Hartmann sensor
phase imaging
metrology
X-ray sources
Online Access:https://www.mdpi.com/1424-8220/21/3/874

Internet

https://www.mdpi.com/1424-8220/21/3/874

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