Review of Nanoscale Vacuum Devices
The newly developed nanoscale vacuum devices have basic functions similar to traditional vacuum tubes, but can be manufactured by existing silicon-based process lines to achieve small size, light weight, and high integration, which makes them attractive, especially in the recent decade. The historic...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-02-01
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| Series: | Electronics |
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| Online Access: | https://www.mdpi.com/2079-9292/12/4/802 |