A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans
We describe an atomic force microscope (AFM) for the characterization of self-sensing tunneling magnetoresistive (TMR) cantilevers. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5 × 5 ×...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2015-02-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.6.46 |