A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

We describe an atomic force microscope (AFM) for the characterization of self-sensing tunneling magnetoresistive (TMR) cantilevers. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5 × 5 ×...

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Bibliographic Details
Main Authors: Tobias Meier, Alexander Förste, Ali Tavassolizadeh, Karsten Rott, Dirk Meyners, Roland Gröger, Günter Reiss, Eckhard Quandt, Thomas Schimmel, Hendrik Hölscher
Format: Article
Language:English
Published: Beilstein-Institut 2015-02-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.6.46