Characterization of Kink Actuators as Compared to Traditional Chevron Shaped Bent-Beam Electrothermal Actuators
This paper compares the design and performance of kink actuators, a modified version of the bent-beam thermal actuator, to the standard chevron-shaped designs. A variety of kink and chevron actuator designs were fabricated from polysilicon. While the actuators were electrically probed, these designs...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2012-07-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/3/3/542 |