Recent Advances in Organic-inorganic Hybrid Photoresists
Photoresists are radiation-sensitive materials used for forming patterns to build up IC devices. To date, most photoresists have been based on organic polymers, which have been dominating the semiconductor industries over the past few decades. It is obvious that extreme ultraviolet (EUV) lithography...
| Autori principali: | , , , , , , , , , , |
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| Natura: | Articolo |
| Lingua: | English |
| Pubblicazione: |
JommPublish
2021-03-01
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| Serie: | Journal of Microelectronic Manufacturing |
| Soggetti: | |
| Accesso online: | http://www.jommpublish.org/p/69/ |