Effect of oxygen on the crystallinity and defect state of AlxGa1−xN epilayers
The effect of oxygen incorporation on the crystal quality and defect states in AlxGa1−xN epilayers (x = 0.4, 0.6, 0.8) grown by hydride vapor phase epitaxy with and without oxygen gas flow were studied. On the basis of the full width at half-maximum value of the (102) X-ray diffraction rocking curve...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-01-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785422018713 |