Optimized design of the ion optics based on the over-perveance characteristics of the beam current
To illustrate the erosion mechanism of the edge aperture by high-energy ions, a three-dimension simulation model was established, and a particle-in-cell method was applied in tracking the hitting processes as well as a Monte Carlo collision method was used to deal with the particles’ collision. Num...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0139014 |