An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization
In this paper, we present the investigations of an aluminum micro-tweezer designed for micromanipulation applications. It includes design, simulation, fabrication, characterizations, and experimental measurements. Electro-thermo-mechanical FEM-based simulations using COMSOL Multiphysics were perform...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/4/797 |