An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization
In this paper, we present the investigations of an aluminum micro-tweezer designed for micromanipulation applications. It includes design, simulation, fabrication, characterizations, and experimental measurements. Electro-thermo-mechanical FEM-based simulations using COMSOL Multiphysics were perform...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/4/797 |
| _version_ | 1797604272240590848 |
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| author | Rodica-Cristina Voicu Catalin Tibeica |
| author_facet | Rodica-Cristina Voicu Catalin Tibeica |
| author_sort | Rodica-Cristina Voicu |
| collection | DOAJ |
| description | In this paper, we present the investigations of an aluminum micro-tweezer designed for micromanipulation applications. It includes design, simulation, fabrication, characterizations, and experimental measurements. Electro-thermo-mechanical FEM-based simulations using COMSOL Multiphysics were performed to describe the behavior of the micro-electro-mechanical system (MEMS) device. The micro-tweezers were fabricated in aluminum, as structural material, by surface micromachining processes. Experimental measurements were performed and compared with the simulation results. A micromanipulation experiment was performed using titanium microbeads from 10–30 µm to confirm the performance of the micro-tweezer. This study serves as further research regarding the using of aluminum as structural material for MEMS devices designated for pick-and-place operations. |
| first_indexed | 2024-03-11T04:45:05Z |
| format | Article |
| id | doaj.art-db1f2412a9ef4cd28e2eebfab5ad70b9 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T04:45:05Z |
| publishDate | 2023-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-db1f2412a9ef4cd28e2eebfab5ad70b92023-11-17T20:29:31ZengMDPI AGMicromachines2072-666X2023-03-0114479710.3390/mi14040797An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and CharacterizationRodica-Cristina Voicu0Catalin Tibeica1National Institute for Research and Development in Microtechnologies—IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190 Voluntari, Ilfov, RomaniaNational Institute for Research and Development in Microtechnologies—IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190 Voluntari, Ilfov, RomaniaIn this paper, we present the investigations of an aluminum micro-tweezer designed for micromanipulation applications. It includes design, simulation, fabrication, characterizations, and experimental measurements. Electro-thermo-mechanical FEM-based simulations using COMSOL Multiphysics were performed to describe the behavior of the micro-electro-mechanical system (MEMS) device. The micro-tweezers were fabricated in aluminum, as structural material, by surface micromachining processes. Experimental measurements were performed and compared with the simulation results. A micromanipulation experiment was performed using titanium microbeads from 10–30 µm to confirm the performance of the micro-tweezer. This study serves as further research regarding the using of aluminum as structural material for MEMS devices designated for pick-and-place operations.https://www.mdpi.com/2072-666X/14/4/797micro-tweezergripperelectro-thermalaluminumV-actuator |
| spellingShingle | Rodica-Cristina Voicu Catalin Tibeica An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization Micromachines micro-tweezer gripper electro-thermal aluminum V-actuator |
| title | An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization |
| title_full | An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization |
| title_fullStr | An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization |
| title_full_unstemmed | An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization |
| title_short | An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization |
| title_sort | aluminum electro thermally actuated micro tweezer manufacturing and characterization |
| topic | micro-tweezer gripper electro-thermal aluminum V-actuator |
| url | https://www.mdpi.com/2072-666X/14/4/797 |
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