CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates

Demand for the detection of carbon dioxide (CO 2 ) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the developmen...

Full description

Bibliographic Details
Main Authors: Tatsuya Iwata, Kyosuke Matsuda, Kazuhiro Takahashi, Kazuaki Sawada
Format: Article
Language:English
Published: MDPI AG 2017-09-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/17/9/2156
_version_ 1798000002244542464
author Tatsuya Iwata
Kyosuke Matsuda
Kazuhiro Takahashi
Kazuaki Sawada
author_facet Tatsuya Iwata
Kyosuke Matsuda
Kazuhiro Takahashi
Kazuaki Sawada
author_sort Tatsuya Iwata
collection DOAJ
description Demand for the detection of carbon dioxide (CO 2 ) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the development of the society of the internet of things. In this study, micromachined hotplate-based CO 2 sensors were fabricated and their characteristics were investigated. The sensors have La 2 O 3 /SnO 2 stacked layers as a sensing material and Pt interdigitated electrodes. A CO 2 response of 2.9 for a CO 2 concentration of 1000 ppm was obtained at 350 °C with low power consumption (approximately 17 mW). A relatively large response was obtained compared with previous studies even though a compact sputtered-SnO 2 film was used. This high response was speculated to be due to a significant contribution of the resistance component near the electrode. Furthermore, CO 2 sensing was successfully performed in the CO 2 range of 200–4000 ppm with at least 200-ppm resolution.
first_indexed 2024-04-11T11:13:20Z
format Article
id doaj.art-db3ceec973064f178ce3f4ce9df914aa
institution Directory Open Access Journal
issn 1424-8220
language English
last_indexed 2024-04-11T11:13:20Z
publishDate 2017-09-01
publisher MDPI AG
record_format Article
series Sensors
spelling doaj.art-db3ceec973064f178ce3f4ce9df914aa2022-12-22T04:27:24ZengMDPI AGSensors1424-82202017-09-01179215610.3390/s17092156s17092156CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined HotplatesTatsuya Iwata0Kyosuke Matsuda1Kazuhiro Takahashi2Kazuaki Sawada3Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi 4418122, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi 4418122, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi 4418122, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi 4418122, JapanDemand for the detection of carbon dioxide (CO 2 ) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the development of the society of the internet of things. In this study, micromachined hotplate-based CO 2 sensors were fabricated and their characteristics were investigated. The sensors have La 2 O 3 /SnO 2 stacked layers as a sensing material and Pt interdigitated electrodes. A CO 2 response of 2.9 for a CO 2 concentration of 1000 ppm was obtained at 350 °C with low power consumption (approximately 17 mW). A relatively large response was obtained compared with previous studies even though a compact sputtered-SnO 2 film was used. This high response was speculated to be due to a significant contribution of the resistance component near the electrode. Furthermore, CO 2 sensing was successfully performed in the CO 2 range of 200–4000 ppm with at least 200-ppm resolution.https://www.mdpi.com/1424-8220/17/9/2156CO2 sensormicromachined hotplateLa2O3SnO2
spellingShingle Tatsuya Iwata
Kyosuke Matsuda
Kazuhiro Takahashi
Kazuaki Sawada
CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates
Sensors
CO2 sensor
micromachined hotplate
La2O3
SnO2
title CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates
title_full CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates
title_fullStr CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates
title_full_unstemmed CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates
title_short CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates
title_sort co2 sensing characteristics of a la2o3 sno2 stacked structure with micromachined hotplates
topic CO2 sensor
micromachined hotplate
La2O3
SnO2
url https://www.mdpi.com/1424-8220/17/9/2156
work_keys_str_mv AT tatsuyaiwata co2sensingcharacteristicsofala2o3sno2stackedstructurewithmicromachinedhotplates
AT kyosukematsuda co2sensingcharacteristicsofala2o3sno2stackedstructurewithmicromachinedhotplates
AT kazuhirotakahashi co2sensingcharacteristicsofala2o3sno2stackedstructurewithmicromachinedhotplates
AT kazuakisawada co2sensingcharacteristicsofala2o3sno2stackedstructurewithmicromachinedhotplates