CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates
Demand for the detection of carbon dioxide (CO 2 ) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the developmen...
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MDPI AG
2017-09-01
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Series: | Sensors |
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Online Access: | https://www.mdpi.com/1424-8220/17/9/2156 |
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author | Tatsuya Iwata Kyosuke Matsuda Kazuhiro Takahashi Kazuaki Sawada |
author_facet | Tatsuya Iwata Kyosuke Matsuda Kazuhiro Takahashi Kazuaki Sawada |
author_sort | Tatsuya Iwata |
collection | DOAJ |
description | Demand for the detection of carbon dioxide (CO 2 ) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the development of the society of the internet of things. In this study, micromachined hotplate-based CO 2 sensors were fabricated and their characteristics were investigated. The sensors have La 2 O 3 /SnO 2 stacked layers as a sensing material and Pt interdigitated electrodes. A CO 2 response of 2.9 for a CO 2 concentration of 1000 ppm was obtained at 350 °C with low power consumption (approximately 17 mW). A relatively large response was obtained compared with previous studies even though a compact sputtered-SnO 2 film was used. This high response was speculated to be due to a significant contribution of the resistance component near the electrode. Furthermore, CO 2 sensing was successfully performed in the CO 2 range of 200–4000 ppm with at least 200-ppm resolution. |
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issn | 1424-8220 |
language | English |
last_indexed | 2024-04-11T11:13:20Z |
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spelling | doaj.art-db3ceec973064f178ce3f4ce9df914aa2022-12-22T04:27:24ZengMDPI AGSensors1424-82202017-09-01179215610.3390/s17092156s17092156CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined HotplatesTatsuya Iwata0Kyosuke Matsuda1Kazuhiro Takahashi2Kazuaki Sawada3Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi 4418122, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi 4418122, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi 4418122, JapanDepartment of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi 4418122, JapanDemand for the detection of carbon dioxide (CO 2 ) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the development of the society of the internet of things. In this study, micromachined hotplate-based CO 2 sensors were fabricated and their characteristics were investigated. The sensors have La 2 O 3 /SnO 2 stacked layers as a sensing material and Pt interdigitated electrodes. A CO 2 response of 2.9 for a CO 2 concentration of 1000 ppm was obtained at 350 °C with low power consumption (approximately 17 mW). A relatively large response was obtained compared with previous studies even though a compact sputtered-SnO 2 film was used. This high response was speculated to be due to a significant contribution of the resistance component near the electrode. Furthermore, CO 2 sensing was successfully performed in the CO 2 range of 200–4000 ppm with at least 200-ppm resolution.https://www.mdpi.com/1424-8220/17/9/2156CO2 sensormicromachined hotplateLa2O3SnO2 |
spellingShingle | Tatsuya Iwata Kyosuke Matsuda Kazuhiro Takahashi Kazuaki Sawada CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates Sensors CO2 sensor micromachined hotplate La2O3 SnO2 |
title | CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates |
title_full | CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates |
title_fullStr | CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates |
title_full_unstemmed | CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates |
title_short | CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates |
title_sort | co2 sensing characteristics of a la2o3 sno2 stacked structure with micromachined hotplates |
topic | CO2 sensor micromachined hotplate La2O3 SnO2 |
url | https://www.mdpi.com/1424-8220/17/9/2156 |
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