A Dual-Loop Position Servo System Based on Position and Speed Parallel Control Structure
Traditional position-speed-current loop nested structure cannot satisfy the requirements in industrial applications with high trajectory tracking accuracy and fast dynamic response like vehicle-used laser radars and wafer stages. Thus, a position and speed parallel control structure is proposed to a...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2022-01-01
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Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9765395/ |