A Dual-Loop Position Servo System Based on Position and Speed Parallel Control Structure

Traditional position-speed-current loop nested structure cannot satisfy the requirements in industrial applications with high trajectory tracking accuracy and fast dynamic response like vehicle-used laser radars and wafer stages. Thus, a position and speed parallel control structure is proposed to a...

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Bibliographic Details
Main Authors: Ming Yang, Kaiyuan Liu, Chaoyi Shang, Yangyang Chen, Dianguo Xu
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9765395/