Two High-Precision Proximity Capacitance CMOS Image Sensors with Large Format and High Resolution

Two High-Precision Proximity Capacitance CMOS Image Sensors with Large Format and High Resolution

This paper presents newly developed two high-precision CMOS proximity capacitance image sensors: Chip A with 12 μm pitch pixels with a large detection area of 1.68 cm<sup>2</sup>; Chip B with 2.8 μm pitch 1.8 M pixels for a higher resolution. Both fabricated chips achieved a capacitance...

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Bibliographic Details
Main Authors: Yuki Sugama, Yoshiaki Watanabe, Rihito Kuroda, Masahiro Yamamoto, Tetsuya Goto, Toshiro Yasuda, Hiroshi Hamori, Naoya Kuriyama, Shigetoshi Sugawa
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Sensors
Subjects:
CMOS
proximity capacitance
image sensor
high precision
large format
high resolution
Online Access:https://www.mdpi.com/1424-8220/22/7/2770

Internet

https://www.mdpi.com/1424-8220/22/7/2770

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