Time-Resolved Analysis of the Electron Temperature in RF Magnetron Discharges with a Pulsed Gas Injection

Time-Resolved Analysis of the Electron Temperature in RF Magnetron Discharges with a Pulsed Gas Injection

Pulsed gas injection in a plasma can affect many fundamentals, including electron heating and losses. The case of an asymmetric RF magnetron plasma with a pulsed argon injection is analyzed by optical emission spectroscopy of argon 2p-to-1s transitions coupled with collisional-radiative modeling. Fo...

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Bibliographic Details
Main Authors: Thibault Sadek, Pierre Vinchon, Antoine Durocher-Jean, Guillaume Carnide, Myrtil L. Kahn, Richard Clergereaux, Luc Stafford
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Atoms
Subjects:
optical emission spectroscopy
collisional radiative modeling
RF plasma
magnetron discharges
pulsed gas injection
Online Access:https://www.mdpi.com/2218-2004/10/4/147

Internet

https://www.mdpi.com/2218-2004/10/4/147

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