Generation of Large-area Arrays of Aperiodic Functional Micro/nano Structures Using Phase Shift Interferometry

Generation of Large-area Arrays of Aperiodic Functional Micro/nano Structures Using Phase Shift Interferometry

Phase shift interferometry (PSI) derived from interference technique as greater surface characterization technique based on the interference information recorded during a controlled phase shift. This research shows the development of micro/nano structures using phase shift interferometry. (PSI) is t...

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Bibliographic Details
Main Authors: Pearly Princess. J, A. Alfred Kirubaraj, S. Christina Sophia, S. Senith, S.R. Jino Ramson
Format: Article
Language:English
Published: Polish Academy of Sciences 2022-03-01
Series:International Journal of Electronics and Telecommunications
Subjects:
laser interference lithography (lil)
pattern structures
periodic and aperiodic pattern
phase shift interferometry (psi)
Online Access:https://journals.pan.pl/Content/122807/PDF/13-3315-Princess_sk.pdf

Internet

https://journals.pan.pl/Content/122807/PDF/13-3315-Princess_sk.pdf

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