Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Abstract As one of the most advanced and precise equipment in the world, a photolithography scanner is able to fabricate nanometer‐scale devices on a chip. To realize such a small dimension, the optical system is the fundamental, but the mechanical system often becomes the bottleneck. In the photoli...

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Bibliographic Details
Main Authors: Yi Song, Chengqun Gui, Zongliang Huo, S. W. Ricky Lee, Sheng Liu
Format: Article
Language:English
Published: Wiley 2021-09-01
Series:International Journal of Mechanical System Dynamics
Subjects:
Online Access:https://doi.org/10.1002/msd2.12010