Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review
Abstract As one of the most advanced and precise equipment in the world, a photolithography scanner is able to fabricate nanometer‐scale devices on a chip. To realize such a small dimension, the optical system is the fundamental, but the mechanical system often becomes the bottleneck. In the photoli...
Main Authors: | Yi Song, Chengqun Gui, Zongliang Huo, S. W. Ricky Lee, Sheng Liu |
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Format: | Article |
Language: | English |
Published: |
Wiley
2021-09-01
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Series: | International Journal of Mechanical System Dynamics |
Subjects: | |
Online Access: | https://doi.org/10.1002/msd2.12010 |
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