Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures
Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both simulation and...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-04-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/4/428 |