Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures
Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both simulation and...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-04-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/4/428 |
| _version_ | 1797537817907167232 |
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| author | Harris J. Hall Sean McDaniel Piyush Shah David Torres Jose Figueroa LaVern Starman |
| author_facet | Harris J. Hall Sean McDaniel Piyush Shah David Torres Jose Figueroa LaVern Starman |
| author_sort | Harris J. Hall |
| collection | DOAJ |
| description | Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both simulation and experiment as a rudimentary means to both steer and shape an incident light beam through photothermal actuation. A series of unit step infrared laser exposures were applied at increasing power levels to both uniformly symmetric and deliberately asymmetric absorptive structures with the intent of characterizing the photothermal tilt response. The results indicate that a small angle (<4° at ~74 W/cm<sup>2</sup>) mechanical tilt can be instantiated through central placement of an infrared beam, although directional control appears highly sensitive to initial beam placement. Greater responsivity (up to ~9° mechanical tilt at ~54 W/cm<sup>2</sup>) and gross directional control was demonstrated with an asymmetrical absorptive design, although this response was accompanied by a large amount (~5–10°) of mechanical tilt burn-in and drift. Rigorous device cycling remains to be explored, but the results suggest that these structures, and those similar in construction, can be further matured to achieve controllable photoactuation suitable for optical beam control or other applications. |
| first_indexed | 2024-03-10T12:21:39Z |
| format | Article |
| id | doaj.art-dbe69555b9c84dba9110da5178fb42f3 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T12:21:39Z |
| publishDate | 2021-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-dbe69555b9c84dba9110da5178fb42f32023-11-21T15:30:23ZengMDPI AGMicromachines2072-666X2021-04-0112442810.3390/mi12040428Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film StructuresHarris J. Hall0Sean McDaniel1Piyush Shah2David Torres3Jose Figueroa4LaVern Starman5Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH 45433, USAAir Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH 45433, USAApex Microdevices LLC, West Chester, OH 45431, USAAir Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH 45433, USAKBR Wyle Corporation, Houston, TX 77002, USAAir Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH 45433, USAPhotothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both simulation and experiment as a rudimentary means to both steer and shape an incident light beam through photothermal actuation. A series of unit step infrared laser exposures were applied at increasing power levels to both uniformly symmetric and deliberately asymmetric absorptive structures with the intent of characterizing the photothermal tilt response. The results indicate that a small angle (<4° at ~74 W/cm<sup>2</sup>) mechanical tilt can be instantiated through central placement of an infrared beam, although directional control appears highly sensitive to initial beam placement. Greater responsivity (up to ~9° mechanical tilt at ~54 W/cm<sup>2</sup>) and gross directional control was demonstrated with an asymmetrical absorptive design, although this response was accompanied by a large amount (~5–10°) of mechanical tilt burn-in and drift. Rigorous device cycling remains to be explored, but the results suggest that these structures, and those similar in construction, can be further matured to achieve controllable photoactuation suitable for optical beam control or other applications.https://www.mdpi.com/2072-666X/12/4/428photothermal actuationthin-film structuresmicro-opticsoptical beam control |
| spellingShingle | Harris J. Hall Sean McDaniel Piyush Shah David Torres Jose Figueroa LaVern Starman Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures Micromachines photothermal actuation thin-film structures micro-optics optical beam control |
| title | Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures |
| title_full | Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures |
| title_fullStr | Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures |
| title_full_unstemmed | Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures |
| title_short | Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures |
| title_sort | photothermal optical beam steering using large deformation multi layer thin film structures |
| topic | photothermal actuation thin-film structures micro-optics optical beam control |
| url | https://www.mdpi.com/2072-666X/12/4/428 |
| work_keys_str_mv | AT harrisjhall photothermalopticalbeamsteeringusinglargedeformationmultilayerthinfilmstructures AT seanmcdaniel photothermalopticalbeamsteeringusinglargedeformationmultilayerthinfilmstructures AT piyushshah photothermalopticalbeamsteeringusinglargedeformationmultilayerthinfilmstructures AT davidtorres photothermalopticalbeamsteeringusinglargedeformationmultilayerthinfilmstructures AT josefigueroa photothermalopticalbeamsteeringusinglargedeformationmultilayerthinfilmstructures AT lavernstarman photothermalopticalbeamsteeringusinglargedeformationmultilayerthinfilmstructures |