Recent Progress of Miniature MEMS Pressure Sensors

Recent Progress of Miniature MEMS Pressure Sensors

Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been...

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Bibliographic Details
Main Authors: Peishuai Song, Zhe Ma, Jing Ma, Liangliang Yang, Jiangtao Wei, Yongmei Zhao, Mingliang Zhang, Fuhua Yang, Xiaodong Wang
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Micromachines
Subjects:
pressure sensor
mems
graphene
piezoresistive
resonant pressure sensor
capacitive pressure sensor
optical fiber pressure sensor
piezoelectric pressure sensor
implantable pressure sensor
blood pressure
intraocular pressure
intracranial pressure
Online Access:https://www.mdpi.com/2072-666X/11/1/56

Internet

https://www.mdpi.com/2072-666X/11/1/56

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