Recent Progress of Miniature MEMS Pressure Sensors

Recent Progress of Miniature MEMS Pressure Sensors

Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been...

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Bibliographic Details
Main Authors:	Peishuai Song, Zhe Ma, Jing Ma, Liangliang Yang, Jiangtao Wei, Yongmei Zhao, Mingliang Zhang, Fuhua Yang, Xiaodong Wang
Format:	Article
Language:	English
Published:	MDPI AG 2020-01-01
Series:	Micromachines
Subjects:	pressure sensor mems graphene piezoresistive resonant pressure sensor capacitive pressure sensor optical fiber pressure sensor piezoelectric pressure sensor implantable pressure sensor blood pressure intraocular pressure intracranial pressure
Online Access:	https://www.mdpi.com/2072-666X/11/1/56

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