Influence of Photon Beam and Motor Vibrations on At-Wavelength X-Ray Speckle Scanning Metrology
Speckle scanning metrology is an effective tool to determine the X-ray wave front error in synchrotron radiation. By measuring wave front radii of curvature, X-ray optics can be high-precision aligned and adaptive optics can be used for compensating these wave front errors to pursue an aberration-fr...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Frontiers Media S.A.
2022-04-01
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Series: | Frontiers in Physics |
Subjects: | |
Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2022.864985/full |