Influence of Photon Beam and Motor Vibrations on At-Wavelength X-Ray Speckle Scanning Metrology

Speckle scanning metrology is an effective tool to determine the X-ray wave front error in synchrotron radiation. By measuring wave front radii of curvature, X-ray optics can be high-precision aligned and adaptive optics can be used for compensating these wave front errors to pursue an aberration-fr...

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Bibliographic Details
Main Authors: Naxi Tian, Hui Jiang, Lian Xue, Jianan Xie
Format: Article
Language:English
Published: Frontiers Media S.A. 2022-04-01
Series:Frontiers in Physics
Subjects:
Online Access:https://www.frontiersin.org/articles/10.3389/fphy.2022.864985/full