AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical til...

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Bibliographic Details
Main Authors: Yichen Liu, Lihao Wang, Yongquan Su, Yuyao Zhang, Yang Wang, Zhenyu Wu
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Micromachines
Subjects:
MEMS mirror
piezoelectric
AlScN
mechanical coupling
Lissajous scanning
LiDAR
Online Access:https://www.mdpi.com/2072-666X/13/9/1550

Internet

https://www.mdpi.com/2072-666X/13/9/1550

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