Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes

Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based on silicon bulk micromachined membranes that serve as a...

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Bibliographic Details
Main Authors: Mariya Aleksandrova, Georgi Kolev, Georgi Dobrikov, Andrey Brigadin, Alexander Lukin
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Nanomaterials
Subjects:
bulk micromachined silicon substrates
microfabrication technology
carbyne-enriched nanocoatings
ion-assisted pulse-plasma deposition
volatile organic compounds
Online Access:https://www.mdpi.com/2079-4991/12/12/2066

Internet

https://www.mdpi.com/2079-4991/12/12/2066

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