Quantitative Investigation of Surface Charge Distribution and Point Probing Characteristics of Spherical Scattering Electrical Field Probe for Precision Measurement of Miniature Internal Structures with High Aspect Ratios
For precision measurement of miniature internal structures with high aspect ratios, a spherical scattering electrical field probe (SSEP) is proposed based on charge signal detection. The characteristics and laws governing surface charge distribution on the probing ball of the SSEP are analyzed, with...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-07-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/10/15/5268 |