Efficient Replication of Nanostructured Surfaces

The defined fabrication of nanostructures on surfaces for the nanosciences today largely relies on tools such as scanning probe instruments or electron- and ion beam systems that are serial writing processes. For future production of components and devices, in particular if large nanostruct...

Full description

Bibliographic Details
Main Authors: Helmut Schift, Laura J. Heyderman, Jens Gobrecht
Format: Article
Language:deu
Published: Swiss Chemical Society 2002-10-01
Series:CHIMIA
Subjects:
Online Access:https://chimia.ch/chimia/article/view/3617