Nonlinear Etch Rate of Au-Assisted Chemical Etching of Silicon

Bibliographic Details
Main Authors:	Keorock Choi, Yunwon Song, Bugeun Ki, Jungwoo Oh
Format:	Article
Language:	English
Published:	American Chemical Society 2017-05-01
Series:	ACS Omega
Online Access:	http://dx.doi.org/10.1021/acsomega.7b00232

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