Multi-Focal Laser Direct Writing through Spatial Light Modulation Guided by Scalable Vector Graphics

Multi-focal laser direct writing (LDW) based on phase-only spatial light modulation (SLM) can realize flexible and parallel nanofabrication with high-throughput potential. In this investigation, a novel approach of combining two-photon absorption, SLM, and vector path-guided by scalable vector graph...

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Bibliographic Details
Main Authors: Linhan Duan, Yueqiang Zhu, Haoxin Bai, Chen Zhang, Kaige Wang, Jintao Bai, Wei Zhao
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/4/824