Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method

Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method

This paper presents a Piezoelectric micromechanical ultrasonic transducer (PMUT) based on a Pt/ScAlN/Mo/SiO<sub>2</sub>/Si/SiO<sub>2</sub>/Si multilayer structure with a circular suspension film of scandium doped aluminum nitride (ScAlN). Multiphysics modeling using the finit...

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Bibliographic Details
Main Authors: Xiaonan Liu, Qiaozhen Zhang, Mingzhu Chen, Yaqi Liu, Jianqiu Zhu, Jiye Yang, Feifei Wang, Yanxue Tang, Xiangyong Zhao
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Micromachines
Subjects:
PMUT
Sc-doped AlN
multiphysics modeling
finite element method
Online Access:https://www.mdpi.com/2072-666X/14/10/1942

Internet

https://www.mdpi.com/2072-666X/14/10/1942

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