2D Super‐Resolution Metrology Based on Superoscillatory Light
Abstract Progress in the semiconductor industry relies on the development of increasingly compact devices consisting of complex geometries made from diverse materials. Precise, label‐free, and real‐time metrology is needed for the characterization and quality control of such structures in both scien...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2024-10-01
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| Series: | Advanced Science |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/advs.202404607 |