A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting th...

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Bibliographic Details
Main Authors: Abdullah Saleh Algamili, Mohd Haris Md. Khir, John Ojur Dennis, Abdelaziz Yousif Ahmed, Sami Sultan Alabsi, Saeed Salem Ba Hashwan, Mohammed M. Junaid
Format: Article
Language:English
Published: SpringerOpen 2021-01-01
Series:Nanoscale Research Letters
Subjects:
Actuators
Capacitive
Electromagnetic
Electrostatic
Electrothermal
Fabrication
Online Access:https://doi.org/10.1186/s11671-021-03481-7

Internet

https://doi.org/10.1186/s11671-021-03481-7

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