A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting th...
| Principais autores: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | English |
| Publicado em: |
SpringerOpen
2021-01-01
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| coleção: | Nanoscale Research Letters |
| Assuntos: | |
| Acesso em linha: | https://doi.org/10.1186/s11671-021-03481-7 |
| _version_ | 1827835476435795968 |
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| author | Abdullah Saleh Algamili Mohd Haris Md. Khir John Ojur Dennis Abdelaziz Yousif Ahmed Sami Sultan Alabsi Saeed Salem Ba Hashwan Mohammed M. Junaid |
| author_facet | Abdullah Saleh Algamili Mohd Haris Md. Khir John Ojur Dennis Abdelaziz Yousif Ahmed Sami Sultan Alabsi Saeed Salem Ba Hashwan Mohammed M. Junaid |
| author_sort | Abdullah Saleh Algamili |
| collection | DOAJ |
| description | Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design. |
| first_indexed | 2024-03-12T06:09:05Z |
| format | Article |
| id | doaj.art-dd917a9a865f4ba39dc5dab8e40f50f7 |
| institution | Directory Open Access Journal |
| issn | 1556-276X |
| language | English |
| last_indexed | 2024-03-12T06:09:05Z |
| publishDate | 2021-01-01 |
| publisher | SpringerOpen |
| record_format | Article |
| series | Nanoscale Research Letters |
| spelling | doaj.art-dd917a9a865f4ba39dc5dab8e40f50f72023-09-03T03:19:22ZengSpringerOpenNanoscale Research Letters1556-276X2021-01-0116112110.1186/s11671-021-03481-7A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor DevicesAbdullah Saleh Algamili0Mohd Haris Md. Khir1John Ojur Dennis2Abdelaziz Yousif Ahmed3Sami Sultan Alabsi4Saeed Salem Ba Hashwan5Mohammed M. Junaid6Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONASDepartment of Electrical and Electronic Engineering, Universiti Teknologi PETRONASDepartment of Fundamental and Applied Sciences, Universiti Teknologi PETRONASDepartment of Electrical and Electronic Engineering, Universiti Teknologi PETRONASDepartment of Electrical and Electronic Engineering, Universiti Teknologi PETRONASDepartment of Electrical and Electronic Engineering, Universiti Teknologi PETRONASDepartment of Electrical and Electronic Engineering, Universiti Teknologi PETRONASAbstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.https://doi.org/10.1186/s11671-021-03481-7ActuatorsCapacitiveElectromagneticElectrostaticElectrothermalFabrication |
| spellingShingle | Abdullah Saleh Algamili Mohd Haris Md. Khir John Ojur Dennis Abdelaziz Yousif Ahmed Sami Sultan Alabsi Saeed Salem Ba Hashwan Mohammed M. Junaid A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices Nanoscale Research Letters Actuators Capacitive Electromagnetic Electrostatic Electrothermal Fabrication |
| title | A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices |
| title_full | A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices |
| title_fullStr | A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices |
| title_full_unstemmed | A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices |
| title_short | A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices |
| title_sort | review of actuation and sensing mechanisms in mems based sensor devices |
| topic | Actuators Capacitive Electromagnetic Electrostatic Electrothermal Fabrication |
| url | https://doi.org/10.1186/s11671-021-03481-7 |
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