A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting th...
المؤلفون الرئيسيون: | Abdullah Saleh Algamili, Mohd Haris Md. Khir, John Ojur Dennis, Abdelaziz Yousif Ahmed, Sami Sultan Alabsi, Saeed Salem Ba Hashwan, Mohammed M. Junaid |
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التنسيق: | مقال |
اللغة: | English |
منشور في: |
SpringerOpen
2021-01-01
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سلاسل: | Nanoscale Research Letters |
الموضوعات: | |
الوصول للمادة أونلاين: | https://doi.org/10.1186/s11671-021-03481-7 |
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