A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting th...

Descripció completa

Dades bibliogràfiques
Autors principals:	Abdullah Saleh Algamili, Mohd Haris Md. Khir, John Ojur Dennis, Abdelaziz Yousif Ahmed, Sami Sultan Alabsi, Saeed Salem Ba Hashwan, Mohammed M. Junaid
Format:	Article
Idioma:	English
Publicat:	SpringerOpen 2021-01-01
Col·lecció:	Nanoscale Research Letters
Matèries:	Actuators Capacitive Electromagnetic Electrostatic Electrothermal Fabrication
Accés en línia:	https://doi.org/10.1186/s11671-021-03481-7

Ítems similars

Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor
per: Abdullah S. Algamili, et al.
Publicat: (2024-01-01)

Electro-responsive actuators based on graphene
per: Yong-Lai Zhang, et al.
Publicat: (2021-11-01)

Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation
per: Yong Zhu, et al.
Publicat: (2021-10-01)

Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO<sub>2</sub> Bimorphs
per: Peng Wang, et al.
Publicat: (2019-10-01)

Scanning and Actuation Techniques for Cantilever-Based Fiber Optic Endoscopic Scanners—A Review
per: Mandeep Kaur, et al.
Publicat: (2021-01-01)

A Comb-Drive Actuator Driven by Capacitively-Coupled-Power
per: Chao-Min Chang, et al.
Publicat: (2012-08-01)

Large Out-of-Plane Deflection MEMS Actuators for Optical Applications
per: David Torres, et al.
Publicat: (2018-11-01)

A review of piezoelectric MEMS sensors and actuators for gas detection application
per: Saeed S. Ba Hashwan, et al.
Publicat: (2023-02-01)

Interactive driving of electrostatic film actuator by proximity motion of human body
per: Akira Okuno, et al.
Publicat: (2024-04-01)

Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror
per: Tailong Liu, et al.
Publicat: (2023-02-01)

Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
per: Abdullah S. Algamili, et al.
Publicat: (2022-03-01)

An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
per: Liang Zhou, et al.
Publicat: (2019-05-01)

A Modified U-Shaped Micro-Actuator with a Compliant Mechanism Applied to a Microgripper
per: Pedro Vargas-Chable, et al.
Publicat: (2019-03-01)

Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays
per: Jiahao Chen, et al.
Publicat: (2025-01-01)

Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror
per: Hao Zhang, et al.
Publicat: (2015-12-01)

Design and performance evaluation of thin-film actuators based on flexible Ni-Co substrates
per: Suhwan Kim, et al.
Publicat: (2020-11-01)

Optoelectronic Characterization and Properties of Single-walled Carbon Nanotubes in a Liquid Dispersion Form
per: Sami S. Alabsi, et al.
Publicat: (2023-01-01)

Experimental and Numerical Investigation of the Arms Displacement in a New Electrothermal MEMS Actuator
per: M. Kolahdoozan, et al.
Publicat: (2017-08-01)

A Simple Fabrication Process based on Micro-Masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes
per: Liviu eNicu, et al.
Publicat: (2016-03-01)

MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation
per: Md Kamrul Hasan, et al.
Publicat: (2024-12-01)

Z-Shaped Electrothermal Microgripper Based on Novel Asymmetric Actuator
per: Margarita Tecpoyotl-Torres, et al.
Publicat: (2022-09-01)

Electrothermal Actuators with Ultrafast Response Speed and Large Deformation
per: Guinan Chen, et al.
Publicat: (2020-08-01)

Wafer‐Scale CMOS‐Compatible Electro‐Thermally Actuated Nanomechanical Non‐Volatile Switch with Out‐of‐Plane Electrode Configuration
per: Yong‐Bok Lee, et al.
Publicat: (2024-09-01)

Chopstick Robot Driven by X-shaped Soft Actuator
per: Kahye Song, et al.
Publicat: (2020-04-01)

Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption
per: Miguel Lara-Castro, et al.
Publicat: (2017-06-01)

MEMS resonators with electrostatic actuation and piezoresistive readout for sensing applications
per: Cláudia Coelho, et al.
Publicat: (2022-08-01)

Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications
per: Abdurrashid Hassan Shuaibu, et al.
Publicat: (2024-10-01)

Cricket Inspired High Efficiency MEMS Speakers
per: Meera Garud, et al.
Publicat: (2017-08-01)

Design of a 1 DOF MEMS motion stage for a parallel plane geometry rheometer
per: Yong-Sik Kim, et al.
Publicat: (2015-12-01)

Design and Simulation of a Low-Actuation-Voltage MEMS Switch
per: Yasser Mafinejad, et al.
Publicat: (2016-12-01)

Actuation of Mobile Microbots: A Review
per: Hussein Hussein, et al.
Publicat: (2023-09-01)

Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators
per: Florina Serdean, et al.
Publicat: (2020-07-01)

Design and analysis of CPW based shunt capacitive RF MEMS switch
per: T. Lakshmi Narayana, et al.
Publicat: (2017-01-01)

Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems
per: Almothana Albukhari, et al.
Publicat: (2023-04-01)

Position Estimator Design for a MEMS Top-Drive Electrostatic Rotary Actuator
per: Jemin Woo, et al.
Publicat: (2020-12-01)

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators
per: Thomas Sciberras, et al.
Publicat: (2021-12-01)

High-Frequency Grating-Based Microelectromechanical Systems Actuator
per: Inês Pires, et al.
Publicat: (2024-04-01)

Design and fabrication of the trapezoidal electrostatic comb-drive actuator
per: Pham Hong Phuc, et al.
Publicat: (2012-11-01)

Modeling and Design Enhancement of Electrothermal Actuators for Microgripping Applications
per: Parham Dadash Pour, et al.
Publicat: (2023-09-01)

Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator
per: CHEN Hao, WANG Xinjie, WANG Jiong, XI Zhanwen, NIE Weirong
Publicat: (2021-10-01)