A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting th...

Bibliografske podrobnosti
Main Authors:	Abdullah Saleh Algamili, Mohd Haris Md. Khir, John Ojur Dennis, Abdelaziz Yousif Ahmed, Sami Sultan Alabsi, Saeed Salem Ba Hashwan, Mohammed M. Junaid
Format:	Article
Jezik:	English
Izdano:	SpringerOpen 2021-01-01
Serija:	Nanoscale Research Letters
Teme:	Actuators Capacitive Electromagnetic Electrostatic Electrothermal Fabrication
Online dostop:	https://doi.org/10.1186/s11671-021-03481-7

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